Page 3 of catalogue Laser displacement sensors of Micro-Epsilon Messtechnik GmbH & Co. KG

3

page 10-13

CoMPaCT & Low CoST Series 1300 / 1401
ranges 5 - 250mm resolution from 3µm for tiny installation rooms
Ranges
100µm 1mm 10mm 100mm 1m

CMOS sensor element Output analogue / digital (series 1401) Integrated controller Auto Target Compensation (ATC) Adjustable filter functions (series 1401)
Linearity
100nm 1µm 10µm 100µm 1mm 10mm

DAQ and configuration Software (series 1401) Performance certificate (series 1401) High flex cables rated for moving cable tracks Robot rated cable
Resolution
10nm 100nm 1µm 10µm 100µm 1mm

page 14-19

HigH PerforMaNCe wiTH iNTegraTeD CoNTroLLer Series 1700 / 1700LL / 1700DR
ranges 2 - 750mm resolution from 0.1µm No external controller anti speckle and specular model
Ranges
100µm 1mm 10mm 100mm 1m

Linearity
100nm 1µm

CCD sensor element Output analogue / digital Integrated controller Auto Target Compensation (ATC) Real-Time-Surface-Compensation (RTSC) Adjustable filter functions
10µm 100µm 1mm 10mm

DAQ and configuration software Performance certificate Option for direct reflection or metal target High flex cables for drag chain use Robot rated cable
Resolution
10nm 100nm 1µm 10µm 100µm 1mm

page 20-23

HigHeST PreCiSioN SeNSor Series 2200 / 2200LL
ranges 2 - 200mm resolution from 0.03µm unmatched accuracy anti speckle sensor
Ranges
100µm 1mm 10mm 100mm 1m

CCD sensor element Output analogue / digital Auto Target Compensation (ATC) Real-Time-Surface-Compensation (RTSC) Adjustable filter functions
Linearity
100nm 1µm 10µm 100µm 1mm 10mm

DAQ and configuration software Performance certificate Option for direct reflection or metal target High flex cables for drag chain use
Resolution
10nm 100nm 1µm 10µm 100µm 1mm

page 24-27

HigHeST PreCiSioN aT MaxiMuM SPeeD Series 2220 / 2220LL
ranges 2 - 200mm resolution from 0.03µm Maximum speed anti speckle sensor
Ranges
100µm 1mm 10mm 100mm 1m

CCD sensor element Output analogue / digital Auto Target Compensation (ATC) Real-Time-Surface-Compensation (RTSC) Adjustable filter functions
Linearity
100nm 1µm 10µm 100µm 1mm 10mm

DAQ and configuration software Performance certificate Option for direct reflection or metal target High flex cables for drag chain use
Resolution
10nm 100nm 1µm 10µm 100µm 1mm

page 28-29

Large STaND off Series 1810-50 / 2210
ranges 10 - 50mm resolution from 0.5µm Large stand off
Ranges
100µm 1mm 10mm 100mm 1m

CCD sensor element Output analogue / digital Auto Target Compensation (ATC) Real-Time-Surface-Compensation (RTSC)
Linearity
100nm 1µm 10µm 100µm 1mm 10mm

Adjustable filter functions DAQ and configuration software Performance certificate High flex cables for drag chain use
Resolution
10nm 100nm 1µm 10µm 100µm 1mm

page 30-31

THe HigH SPeeD True aNaLogue SeNSor Series 1607
ranges 0.5 - 200mm resolution from 0.1µm Selectable frequencies up to 37kHz (-3dB)
Ranges
100µm 1mm 10mm 100mm 1m

PSD sensor element Output analogue / digital Auto Target Compensation (ATC)

Performance certificate High flex cables for drag chain use

Linearity
100nm 1µm 10µm 100µm 1mm 10mm

Resolution
10nm 100nm 1µm 10µm 100µm 1mm